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Fabrication of height modulated and tapered features in fused silica

This LLNL invention allows for the fabrication of complex waveplate features and topologies from fused silica, a highly desirable and durable waveplate material.  It also is a unique technique for density multiplication and high-fidelity bidirectional deposition, which can create optical components that are generally for entirely new classes of optical materials.

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Standing in LLNL’s Center for Micro Nano Technology, Nathan Ray holds a marvel of optical engineering, a 5-centimeter metasurface optic

This LLNL invention concerns a method for patterning the index of refraction by fabricating a spatially invariant metasurface, and then apply spatially varied mechanical loading to compress the metasurface features vertically and spread them radially. In doing so, the index of refraction can be re-written on the metasurface, thus enabling index patterning. This process allows rapid 'rewriting…

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structures created using method for producing laser gain media by atomic layer deposition

Powder atomic layer deposition process is used to coat nanopowders of host materials (e.g. yttrium aluminum garnet) with optically active neodymium organometal precursor followed by O2/O3 RF plasma to convert to a single layer of Nd2O3. The process can be repeated to build arbitrarily thick layers with custom doping profiles and followed by post-…

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SEM image of etched metasurface with angled features

This novel invention specifically enables the fabrication of arbitrarily tailored birefringence characteristics in nano-structured meta-surfaces on non-birefringent substrates (e.g. fused silica). The birefringent nano-structured meta-surface is produced by angled directional reactive ion beam etching through a nano-particle mask. This method enables the simultaneous tailoring of refractive…

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Schematic of one methodology for achieving a thicker substrate engraved meta-surface (SEMS) layer

This invention (US Patent No. 11,294,103) is an extension of another LLNL invention, US Patent No. 10,612,145, which utilizes a thin sacrificial metal mask layer deposited on a dielectric substrate (e.g. fused silica) and subsequently nanostructured through a laser generated selective thermal de-wetting process.

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Laser peening induces deep compressive stress, which significantly extends the service lifetime over any conventional treatment

This invention proposes using a pulse laser configured to generate laser pulses and a controller for controlling operation of the pulse laser. The controller is further configured to control the pulse laser to cause the pulse laser to generate at least one of the laser pulses with a spatiotemporally varying laser fluence over a duration of at least one of the laser pulses. The spatiotemporally…

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Scanning electron micrograph of scalable, grating-like nanoscale metal mask (line period ~35 nm)

This invention consists of a method of forming nanoscale metal lines to produce a grating-like mask with wide area coverage over the surface of a durable optical material such as fused silica. Subsequent etching processes transfer the metal mask to the underlying substrate forming a birefringent metasurface. This method enables the production of ultrathin waveplates for high power laser…

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Scanning electron micrograph of bulk metamaterial structures fabricated at LLNL

Heat sensitive materials such as piezoelectric and MEMS devices and assemblies, magnetic sensors, nonlinear optical crystals, laser glass or solid-state laser materials, etc. cannot be exposed to excess temperatures which in the context of this invention, means materials that cannot be exposed to temperatures greater than 50°C (122°F). LLNL’s invention describes a low-temperature method of…

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Linearly polarized light entering a half-wave plate can be resolved into two waves, parallel and perpendicular to the optic axis of the waveplate ("Waveplate" by Bob Mellish is licensed under CC BY-SA 3.0).

This novel method of producing waveplates from isotropic optical materials (e.g. fused silica) consists of forming a void-dash metasurface using the following process steps:

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creation of ultra-high energy density matter by an intense laser pulse
Livermore Lab researchers have developed two new methods for improving the efficiency of laser drilling. The first method is based on multi-pulse laser technology. Two synchronized free-running laser pulses from a tandem-head Nd:YAG laser and a gated CW laser are capable of drilling through 1/8-in-thick stainless-steel targets at a standoff distance of 1 m without gas-assist. The combination of a…
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nuclear reactor

The new LLNL technique works by transiently removing and trapping concrete or rock surface material, so that contaminants are confined in a manner that is easy to isolate and remove. Our studies suggest that 10 m2 of surface could be processed per hour. The technique easily scales to more surface/hr.